EDWARDS Series
QDP / IHS / IH / IL / IGX / EH / GV / QMB / HCMB / IXH Series
Vacuum Pump Parts Detail
| No. | Model | Sub Category | Part Name | Part Number |
|---|---|---|---|---|
| 1 | IXM200/IXM600/IXM1200/IXM1800 | Lower Pump | X SHAFT | IXM-X-001 |
| 2 | Y SHAFT | IXM-X-002 | ||
| 3 | IXM1200 | Upper Pump | X SHAFT | IXM1200-03 |
| 4 | Y SHAFT | IXM1200-04 | ||
| 5 | IXM1800 | Upper Pump | X SHAFT | IXM1800-03 |
| 6 | Y SHAFT | IXM1800-04 | ||
| 8 | IXH100 | Single Pump | 3RD Stator | IXH100-01 |
| 9 | 4TH Stator | IXH100-02 | ||
| 10 | X2 Claw | IXH100-03 | ||
| 11 | Y2 Claw | IXH100-04 | ||
| 12 | X3 Claw | IXH100-05 | ||
| 13 | Y3 Claw | IXH100-06 | ||
| 14 | X4 Claw | IXH100-07 | ||
| 15 | Y4 Claw | IXH100-08 | ||
| 16 | X5 Claw | IXH100-09 | ||
| 17 | Y5 Claw | IXH100-10 | ||
| 18 | LV Claw | IXH100-11 | ||
| 19 | X SHAFT | IXH100-12 | ||
| 20 | Y SHAFT | IXH100-13 | ||
| 21 | IXH200H | Single Pump | 3RD Stator | IXH200-01 |
| 22 | 4TH Stator | IXH200-02 | ||
| 23 | LV Stator | IXH200-03 | ||
| 24 | X2 Claw | IXH200-04 | ||
| 25 | Y2 Claw | IXH200-05 | ||
| 26 | X3 Claw | IXH200-06 | ||
| 27 | Y3 Claw | IXH200-07 | ||
| 28 | X4 Claw | IXH200-08 | ||
| 29 | Y4 Claw | IXH200-09 | ||
| 30 | LV Claw | IXH200-10 | ||
| 31 | X SHAFT | IXH200-11 | ||
| 32 | Y SHAFT | IXH200-12 | ||
| 33 | IXH500H | Single Pump | 3RD Stator | IXH500H-01 |
| 34 | 4TH Stator | IXH500H-02 | ||
| 35 | 5TH Stator | IXH500H-03 | ||
| 36 | LV Stator | IXH500H-04 | ||
| 37 | X2 Claw | IXH500H-05 | ||
| 38 | Y2 Claw | IXH500H-06 | ||
| 39 | X3 Claw | IXH500H-07 | ||
| 40 | Y3 Claw | IXH500H-08 | ||
| 41 | X4 Claw | IXH500H-09 | ||
| 42 | Y4 Claw | IXH500H-10 | ||
| 43 | X5 Claw | IXH500H-11 | ||
| 44 | Y5 Claw | IXH500H-12 | ||
| 45 | LV Claw | IXH500H-13 | ||
| 46 | X SHAFT | IXH500H-14 | ||
| 47 | Y SHAFT | IXH500H-15 | ||
| 49 | IXH610 | Lower Pump | 3RD Stator | IXH610-01 |
| 50 | 4TH Stator | IXH610-02 | ||
| 51 | X2 Claw | IXH610-03 | ||
| 52 | Y2 Claw | IXH610-04 | ||
| 53 | X3 Claw | IXH610-05 | ||
| 54 | Y3 Claw | IXH610-06 | ||
| 55 | X4 Claw | IXH610-07 | ||
| 56 | Y4 Claw | IXH610-08 | ||
| 57 | X5 Claw | IXH610-09 | ||
| 58 | Y5 Claw | IXH610-10 | ||
| 59 | LV Claw | IXH610-11 | ||
| 60 | X SHAFT | IXH610-12 | ||
| 61 | Y SHAFT | IXH610-13 | ||
| 62 | IXH1210 | Upper Pump | X SHAFT | IXH1210-01 |
| 63 | Y SHAFT | IXH1210-02 | ||
| 64 | Lower Pump | 3RD Stator | IXH1210-03 | |
| 65 | 4TH Stator | IXH1210-04 | ||
| 66 | X2 Claw | IXH1210-05 | ||
| 67 | Y2 Claw | IXH1210-06 | ||
| 68 | X3 Claw | IXH1210-07 | ||
| 69 | Y3 Claw | IXH1210-08 | ||
| 70 | X4 Claw | IXH1210-09 | ||
| 71 | Y4 Claw | IXH1210-10 | ||
| 72 | X5 Claw | IXH1210-11 | ||
| 73 | Y5 Claw | IXH1210-12 | ||
| 74 | LV Claw | IXH1210-13 | ||
| 75 | X SHAFT | IXH1210-14 | ||
| 76 | Y SHAFT | IXH1210-15 | ||
| 77 | IXH1210H（HT) | Upper Pump | X SHAFT | IXH1210H-01 |
| 78 | Y SHAFT | IXH1210H-02 | ||
| 79 | Lower Pump | 3RD Stator | IXH1210H-03 | |
| 80 | 4TH Stator | IXH1210H-04 | ||
| 81 | LV Stator | IXH1210H-05 | ||
| 82 | X2 Claw | IXH1210H-06 | ||
| 83 | Y2 Claw | IXH1210H-07 | ||
| 84 | X3 Claw | IXH1210H-08 | ||
| 85 | Y3 Claw | IXH1210H-09 | ||
| 86 | X4 Claw | IXH1210H-10 | ||
| 87 | Y4 Claw | IXH1210H-11 | ||
| 88 | LV Claw | IXH1210H-12 | ||
| 89 | X SHAFT | IXH1210H-13 | ||
| 90 | Y SHAFT | IXH1210H-14 | ||
| 91 | IXH1220H（HT、HTX) | Upper Pump | X SHAFT | IXH1220H-01 |
| 92 | Y SHAFT | IXH1220H-02 | ||
| 93 | Lower Pump | 3RD Stator | IXH1220H-03 | |
| 94 | 4TH Stator | IXH1220H-04 | ||
| 95 | LV Stator | IXH1220H-05 | ||
| 96 | X2 Claw | IXH1220H-06 | ||
| 97 | Y2 Claw | IXH1220H-07 | ||
| 98 | X3 Claw | IXH1220H-08 | ||
| 99 | Y3 Claw | IXH1220H-09 | ||
| 100 | X4 Claw | IXH1220H-10 | ||
| 101 | Y4 Claw | IXH1220H-11 | ||
| 102 | LV Claw | IXH1220H-12 | ||
| 103 | X SHAFT | IXH1220H-13 | ||
| 104 | Y SHAFT | IXH1220H-14 | ||
| 105 | IXH1820（XD、T) | Upper Pump | X SHAFT | IXH1820-01 |
| 106 | Y SHAFT | IXH1820-02 | ||
| 107 | Lower Pump | 3RD Stator | IXH1820-03 | |
| 108 | 4TH Stator | IXH1820-04 | ||
| 109 | LV Stator | IXH1820-05 | ||
| 110 | X2 Claw | IXH1820-06 | ||
| 111 | Y2 Claw | IXH1820-07 | ||
| 112 | X3 Claw | IXH1820-08 | ||
| 113 | Y3 Claw | IXH1820-09 | ||
| 114 | X4 Claw | IXH1820-10 | ||
| 115 | Y4 Claw | IXH1820-11 | ||
| 116 | LV Claw | IXH1820-12 | ||
| 117 | X SHAFT | IXH1820-13 | ||
| 118 | Y SHAFT | IXH1820-14 | ||
| 119 | IXH1820H（HTX) | Upper Pump | X SHAFT | IXH1820H-01 |
| 120 | Y SHAFT | IXH1820H-02 | ||
| 121 | Lower Pump | 3RD Stator | IXH1820H-03 | |
| 122 | 4TH Stator | IXH1820H-04 | ||
| 123 | LV Stator | IXH1820H-05 | ||
| 124 | X2 Claw | IXH1820H-06 | ||
| 125 | Y2 Claw | IXH1820H-07 | ||
| 126 | X3 Claw | IXH1820H-08 | ||
| 127 | Y3 Claw | IXH1820H-09 | ||
| 128 | X4 Claw | IXH1820H-10 | ||
| 129 | Y4 Claw | IXH1820H-11 | ||
| 130 | LV Claw | IXH1820H-12 | ||
| 131 | X SHAFT | IXH1820H-13 | ||
| 132 | Y SHAFT | IXH1820H-14 | ||
| 133 | IXH3030 （T、TX) | Upper Pump | X SHAFT | IXH3030-01 |
| 134 | Y SHAFT | IXH3030-02 | ||
| 135 | Lower Pump | 3RD Stator | IXH3030-03 | |
| 136 | 4TH Stator | IXH3030-04 | ||
| 137 | LV Stator | IXH3030-05 | ||
| 138 | X2 Claw | IXH3030-06 | ||
| 139 | Y2 Claw | IXH3030-07 | ||
| 140 | X3 Claw | IXH3030-08 | ||
| 141 | Y3 Claw | IXH3030-09 | ||
| 142 | X4 Claw | IXH3030-10 | ||
| 143 | Y4 Claw | IXH3030-11 | ||
| 144 | LV Claw | IXH3030-12 | ||
| 145 | X SHAFT | IXH3030-13 | ||
| 146 | Y SHAFT | IXH3030-14 | ||
| 147 | IXH3050H（HT) | Upper Pump | X SHAFT | IXH3050H-01 |
| 148 | Y SHAFT | IXH3050H-02 | ||
| 149 | Single Pump | 3RD Stator | IXH3050H-03 | |
| 150 | 4TH Stator | IXH3050H-04 | ||
| 151 | 5TH Stator | IXH3050H-05 | ||
| 152 | LV Stator | IXH3050H-06 | ||
| 153 | X2 Claw | IXH3050H-07 | ||
| 154 | Y2 Claw | IXH3050H-08 | ||
| 155 | X3 Claw | IXH3050H-09 | ||
| 156 | Y3 Claw | IXH3050H-10 | ||
| 157 | X4 Claw | IXH3050H-11 | ||
| 158 | Y4 Claw | IXH3050H-12 | ||
| 159 | X5 Claw | IXH3050H-13 | ||
| 160 | Y5 Claw | IXH3050H-14 | ||
| 161 | LV Claw | IXH3050H-15 | ||
| 162 | X SHAFT | IXH3050H-16 | ||
| 163 | Y SHAFT | IXH3050H-17 | ||
| 164 | IXH4550H（HT) | Upper Pump | X SHAFT | IXH4550H-01 |
| 165 | Y SHAFT | IXH4550H-02 | ||
| 166 | Single Pump | 3RD Stator | IXH4550H-03 | |
| 167 | 4TH Stator | IXH4550H-04 | ||
| 168 | 5TH Stator | IXH4550H-05 | ||
| 169 | LV Stator | IXH4550H-06 | ||
| 170 | X2 Claw | IXH4550H-07 | ||
| 171 | Y2 Claw | IXH4550H-08 | ||
| 172 | X3 Claw | IXH4550H-09 | ||
| 173 | Y3 Claw | IXH4550H-10 | ||
| 174 | X4 Claw | IXH4550H-11 | ||
| 175 | Y4 Claw | IXH4550H-12 | ||
| 176 | X5 Claw | IXH4550H-13 | ||
| 177 | Y5 Claw | IXH4550H-14 | ||
| 178 | LV Claw | IXH4550H-15 | ||
| 179 | X SHAFT | IXH4550H-16 | ||
| 180 | Y SHAFT | IXH4550H-17 | ||
| 181 | IXH6050H（HT) | Upper Pump | X SHAFT | IXH4550H-01 |
| 182 | Y SHAFT | IXH4550H-02 | ||
| 183 | Single Pump | 3RD Stator | IXH4550H-03 | |
| 184 | 4TH Stator | IXH4550H-04 | ||
| 185 | 5TH Stator | IXH4550H-05 | ||
| 186 | LV Stator | IXH4550H-06 | ||
| 187 | X2 Claw | IXH4550H-07 | ||
| 188 | Y2 Claw | IXH4550H-08 | ||
| 189 | X3 Claw | IXH4550H-09 | ||
| 190 | Y3 Claw | IXH4550H-10 | ||
| 191 | X4 Claw | IXH4550H-11 | ||
| 192 | Y4 Claw | IXH4550H-12 | ||
| 193 | X5 Claw | IXH4550H-13 | ||
| 194 | Y5 Claw | IXH4550H-14 | ||
| 195 | LV Claw | IXH4550H-15 | ||
| 196 | X SHAFT | IXH4550H-16 | ||
| 197 | Y SHAFT | IXH4550H-17 |
Total 195 records